Vibration isolation design and performance analysis of electric butterfly valve
Imprint lithography machine is a kind of precision instrument, and the external environment excitation has a great impact on the imprint lithography machine. The electric butterfly valve is a kind of shock absorber. The electric butterfly valve is used to isolate the interference of the external environment on the imprint lithography machine, which can protect the imprint lithography machine from low-frequency excitation force. This paper describes the vibration isolation principle of the single degree of freedom vibration isolation system of the low-frequency electric butterfly valve of the imprint lithography machine, and determines the rigidity of the electric butterfly valve and the natural frequency of the vibration isolation system, The theoretical results of the natural frequency and vibration isolation efficiency of the vibration isolation system are consistent with the experimental results of the actual vibration isolation system, indicating that the low-frequency vibration isolation design of the imprint lithography machine is reasonable and feasible.